Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
22nd Fall Meeting of The Ceramic Society of Japan
Session ID : 1M05
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Host: The Ceramic Society of Japan

10nm thick cylindrical Al2O3 : Fabrication and Properties
*Tatsuro Saito, Katsunori Matsumura, Y. F. Liu, Yutaka Kagawa
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Keywords: ultrathin, Al2O3, cylindrical
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[in Japanese]
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© The Ceramic Society of Japan 2009
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