Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
22nd Fall Meeting of The Ceramic Society of Japan
Session ID : 1PA15
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Host: The Ceramic Society of Japan

Low temperature annealing of PZT films by aerosol deposition
*Tomohiro Fujisawa, Toshihisa Okubo, Yoichi Suzuki, Hirotaka Kawai, Hiromitu Umezawa, Mituteru Inoue
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Keywords: Aerosol Deposition Method, MOSLM, Excimer Laser, PZT
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[in Japanese]
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© The Ceramic Society of Japan 2009
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