Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
22nd Fall Meeting of The Ceramic Society of Japan
Session ID : 1PA14
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Host: The Ceramic Society of Japan

Preparation and evaluation of PZT films deposited by plasma assisted aerosol deposition method
*Naoki Akita, Masakazu Mori, So Baba, Jun Akedo
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Keywords: AD method, Plasma assistance, PZT film
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[in Japanese]
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© The Ceramic Society of Japan 2009
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