Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2009
Session ID : 3I25
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Host: The Ceramic Society of Japan

High-speed preparation of alpha-Al2O3 films by laser chemical vapor deposition
*YU YOU, RONG TU, TAKASHI GOTO
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Keywords: Laser-CVD, alpha-alumina, High-speed deposition
CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© The Ceramic Society of Japan 2009
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