Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 1H26
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Host: The Ceramic Society of Japan

Optimization of Film Thickness and Material Design in Piezoelectric Thin Film Actuator
*Jun Akedo, Jaehyuk Park, Muneyasu Suzuki
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Keywords: piezoelectric thin film, optical scanner, microactuator
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Abstract
Optimization of Film Thickness and Material Design in Piezoelectric Thin Film Actuator
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© The Ceramic Society of Japan 2011
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