Sensor and actuator devices with co-fired multilayer piezoceramics

Abstract

Murata Mfg. has been producing co-fired multilayer piezoceramics commercially. Various applications of devices such as sensors, actuators and transformers had been developed so far. Multilayered piezo structure reduces driving voltage as well as acoustic or mechanical energy loss on the boundary of layers. It also enables vibration mode controlling with geometric arrangement of inner electrodes. In this report, several categories of multilayered piezoceramic devices will be overviewed.