Fabrication of two-dimensional close-packed structure in ceramic thin films aiming at the new device application

Abstract

A ceramic thin film with a periodical hemispherical structure on a Si substrate is prepared using pulsed laser deposition (PLD) with close-packed monolayer polystyrene (PS) colloidal crystals as a template. Compared with a top-down approach such as photolithography , this method has an advantage from the point of production cost. The morphology of the film can be controlled by the geometry of the substrate in the PLD chamber. The purpose of this work is to establish a method of preparing new device application using this method.