Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 2E22
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Host: The Ceramic Society of Japan

Effect of the Stress-Engineering in BaTiO3 Thin Film on Si Substrate
*Kohei Fukamachi, Naonori Sakamaoto, Fu Desheng, Naoki Wakiya, Tomoya Ohno, Takeshi Matsuda, Hisao Suzuki
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Keywords: barium titanate, thin film, lanthanum nickel oxide, CSD, sputtering
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[in Japanese]
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© The Ceramic Society of Japan 2011
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