Thermal conductivity and effusivity measurement for high thermal conductive materials by periodic heating thermoreflectance technique

Abstract

The evaluation of thermal properties of thin film is of great importance in many areas of physics and engineering. For example, in the development of electrical device, thermal management is necessary for reliability of semiconductor circuits. Thermoreflectance technique is a powerful tool to measure thermal properties of the advanced material and thin film. We introduce the period heating thermoreflectance technique measurement with some applications.