Abstract
Bi4Ti3O12 (BiT) ceramic films on glass and Pt/Ti/YSZ substrates were prepared by an aerosol deposition method, and their dielectric and polarization properties were investigated. The XRD analysis revealed that the BiT films with a thickness of 4.5 m had a random orientation. BiT thick films annealed at 800 deg. for 30 min represented 9 C/cm2 of remanent polarization (Pr) and 71 kV/cm of coercive field (Ec).