Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 3R19
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Host: The Ceramic Society of Japan

Development of optical MEMS mirror devices using Lamb-wave-resonance piezoelectric driving method
*JAEHYUK PARK, JUN AKEDO
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Keywords: Optical MEMS, piezoelectric, aerosol deposition
CONFERENCE PROCEEDINGS FREE ACCESS

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[in Japanese]
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© The Ceramic Society of Japan 2011
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