Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
24th Fall Meeting of The Ceramic Society of Japan
Session ID : 3R20
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Host: The Ceramic Society of Japan

Formation of Dielectric Films by Aerosol Deposition Method with Plasma Assistance
*Masakazu Mori, Tomofumi Baba, Tsubasa Nagamoto, Takahito Imai, Jun Akedo
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Keywords: Aerosol deposition, Plasma assistance, Dielectric film, Dielectric properties
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[in Japanese]
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© The Ceramic Society of Japan 2011
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