Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2011
Session ID : 3A07
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Preparation of BaTi2O5 films on (100), (110) and (111) MgO substrates by laser CVD
*Dongyun GuoAkihiko ItoRong TuTakashi Goto
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Abstract
BaTi2O5 (BT2) films were prepared on (100), (110) and (111) MgO substrates by laser CVD using Ba(DPM)2 and Ti(OiPr)2(DPM)2 as precursors. The orientation of BT2 films on (100), (110) and (111) MgO substrates was (020), (112) and (-113), respectively. The growth modes of BT2 films prepared on different MgO substrates were investigated.
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© The Ceramic Society of Japan 2011
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