Abstract
Lead Magnesium Niobate, Pb(Mg1/3Nb2/3)O3(PMN), is one of the most famous relaxor type ferroelectric material. Its epitaxial thin films were prepared by Metal Organic Decomposition (MOD) method for analysis of its local structure, Polar Nano Region(PNR) and Chemical Order Region(COR). However PMN single crystal film was obtained by annealing at 923 K, iit was bad on orientation to SrTiO3(001) substrate. On the other hand, PMN film annealed at1073 K was better on the orientation and suitable for sample of HREM analysis, even if there were pyrochlore phase. The HREM image shows shifts of Pb atom, which may indicate local electric fields.