Abstract
Copper hydroxide was dissolved in ammonium hydroxide with ammonium bicarbonate to use for a precursor solution of spray pyrolysis. The solution was sprayed ultrasonically and carried into a tube furnace by N2 gas. Copper nitride (Cu3N) particles were formed at pyrolysis temperatures of 300-500oC. Not only the temperature of pyrolysis but also that of the collecting filter was important factor for the formation of single phase Cu3N, i.e. both temperatures around 400oC was optimum. Oxide phases were mixed when the temperatures were lower. Addition of small amount of H2 in the carrier gas was effective to suppress the formation of the oxide phases.
