Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2011
Session ID : 3H02
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Host: The Ceramic Society of Japan

Preparation and characterization of TiN thin films deposited by reactive plasma deposition.
*Koichi TANAKA, Yusuke TANAKA, Hidemitsu TAKAOKA, Akira OSADA
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Keywords: Physical vapor deposition, Titanium niteride, Cemented carbide, Epitaxial growth, Plasma gun
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[in Japanese]
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© The Ceramic Society of Japan 2011
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