Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2011
Session ID : 3H03
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Host: The Ceramic Society of Japan

Preparation and growth mechanism of columnar indium nitride by atmospheric pressure halide chemical vapor deposition
*Tomohiro Murase, Naonori Sakamoto, Naoki Wakiya, Hisao Suzuki
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Keywords: Indium nitride, atmospheric pressure halide chemical vapor deposition, growth mechanism
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[in Japanese]
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© The Ceramic Society of Japan 2011
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