Abstract
YBa2Cu3O7-d (YBCO) films were prepared by laser chemical vapor deposition (laser CVD) and their microstructure was studied by TEM. a-axis oriented YBCO (a-YBCO) films were obtained at deposition temperature below 781 K, whereas c-axis oriented YBCO films were prepared above 817 K. a-YBCO film mainly consisted of a-YBCO grains, but a small amount of secondary phases and growth of c-YBCO grains directly above (100) CeO2 buffer layer was observed. In the c-YBCO film, almost all grains were characterized by c-YBCO grains grew perpendicular to (100) CeO2</sbu>.
