Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2011
Session ID : 3H08
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Host: The Ceramic Society of Japan

Effect of background oxygen pressure on PLD of oxide thin films: case study on tin oxide
Yuhua Zhen, Baoe Li, Jianyong Li, Isao Sakaguchi, Yutaka Adachi, Toshiyuki Nishimura, Hajime Haneda, *Naoki Ohashi
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Keywords: Pulsed Laser Deposition, Tin Oxide, Isotope, Thin Film
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Abstract
Oxygen background pressure on pulsed laser deposition process for oxide film deposition was investigated by isotope tracer technique. The results indicated that low oxygen background pressure improves crystallinity of resultant tin oxide films and that the high crystallinity was achieved by employing tin rich condition where re-evaporation of tin was significant
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© The Ceramic Society of Japan 2011
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