Process optimization of tin oxide films of VOC sensors for nonanal detection

Abstract

Human breath includes many kinds of volatile organic compounds (VOCs), which are generated from metabolism and diseases. It has been reported that breath of lung cancer patients includes nonanal whose concentration is ppb level. SnO2-based semiconductor-type sensors have advantages of simple and real-time monitoring of VOCs-concentration. The sensitivity of SnO2-based gas sensors can be improved for detection of ppb-level-nonanal by additions of Pt, Pd, and Au-catalysts. In this study, we investigate to optimize the film thickness and annealing temperature of SnO2-based gas sensors as nonanal sensors.