Abstract
SiC nano-sized powder is promising as a starting material for structural and functional components. The properties of the final products are dependent on sintering behaviors of the SiC nanoparticles, on which impurities on the powder-surface significantly affect. In this study, micro-chemical and -structural analyses of the surface impurities were implemented. The combinations of X-ray photoelectron spectroscopy, high-resolution transmission electron microscopy and Raman spectroscopy were effective to identify the impurities on the topmost surface of the nano-sized powders.