Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2012
Session ID : 3G28
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Deposition and Evaluation on surface of Al2O3 Films using Aerosol Deposition Method
*Yuta Uemichi, Yuuki Sato, Shinzo Yoshikado
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Keywords: Aerosol Deposition Method, Thin film, Al2O3, Surface Roughness
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[in Japanese]
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© The Ceramic Society of Japan 2012
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