Relationship between Deformation Energy of Al₂O₃ Particles and Deposition Efficiency in Aerosol Deposition

Abstract

Aerosol deposition is a method of forming the dense ceramic films by impacting the ceramic particles to the substrate at room temperature. In order to increase the deposition efficiency, the relationship between the deformation energy of Al₂O₃ particles and the deposition efficiency was investigated. It was found that the deformation energy depends on the process of preparing the particles and the lower deformation energy the particles show, the higher deposition efficiency can be achieved.