Preprints of Annual Meeting of The Ceramic Society of Japan
Preprints of Fall Meeting of The Ceramic Society of Japan
Annual Meeting of The Ceramic Society of Japan, 2012
Session ID : 3K06
Conference information
Fundamental study on the residual stress of sol-gel derived SiO2 thin films
Hiromitsu Kozuka, *Ryohei Kojima, Hiroaki Uchiyama
Author information
Keywords: silica thin film, coating, residual stress, sol-gel method, heat treatment, SiO2 thin film
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© The Ceramic Society of Japan 2012
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top