Fast Initiation and Mode Transition of Radio Frequency Induction Plasmas at Atmospheric Pressure Using Tungsten Pin Electrodes Array

M. Abdur RAZZAK; Shuichi TAKAMURA; Noriyasu OHNO

doi:10.1585/pfr.1.006

Letters

Fast Initiation and Mode Transition of Radio Frequency Induction Plasmas at Atmospheric Pressure Using Tungsten Pin Electrodes Array

M. Abdur RAZZAK, Shuichi TAKAMURA, Noriyasu OHNO

著者情報

キーワード: inductively coupled plasma, radio frequency, tungsten electrodes, electrostatic discharge, static induction transistor

ジャーナルフリー

2006 年 1 巻 p. 006

DOI https://doi.org/10.1585/pfr.1.006

詳細

抄録

The effects of using an array of tungsten pin electrodes on the ignition dynamics of radio frequency (rf) discharges generated by inductively coupled plasma (ICP) technique at atmospheric pressure are investigated experimentally. The experimental observations reveal that the array of tungsten pin electrodes successfully enhance the initial discharges maintained by the strong electrostatic field with stable and fast ignition, which enables us to sustain efficient rf induction plasmas at atmospheric pressure range.

責任著者(Corresponding author)

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