Effect of a Magnetic Filter Across the Exit Hole of a Flat Oxygen Plasma Source

抄録

This study aims to develop a novel flat oxygen plasma source containing a magnetic filter. The aspect ratio of the diameter to the length of the source vessel was approximately four. A pair of small permanent magnets was inserted in a metal flange to generate the magnetic filter at the exit hole of the plasma source. Measured current-voltage characteristics indicated that a clear decrease in the electron temperature was successfully attained across the magnetic filter, which was adequate for producing negative oxygen ions via dissociative electron attachment.