Advanced Fabrication Method of Planar Components for Plasma Diagnostics

Abstract

As the importance of plasma imaging diagnostics increases, the fabrication of high performance millimeterwave planar components becomes essential. This paper describes the development of high performance millimeter-wave planar components such as antennas and filters using a low-loss fluorine substrate. The problems to be solved are the low degree of adhesion between copper foil and the fluorine substrate and the shape of the antenna pattern. In order to solve the problems, surface treatment of fluorine films and a fabrication method using Electro Fine Forming (EF2) are utilized.