Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck Used in Plasma Processing

Released on J-STAGE: February 20, 2009 | Volume 3 Pages 051

Gyu Il SHIM, Hideo SUGAI

Identification of Ballooning-Type Pressure Driven Instability by Tomographic Reconstruction

Released on J-STAGE: July 25, 2025 | Volume 20 1202037

Kentaro TAKEDA, Yasuhiro SUZUKI, Yuki TAKEMURA, Kenji TANAKA, Toshiki KINOSHITA, Hikona SAKAI

Plasma Effects on Electrostatic Chuck Characteristics on Capacitive RF Discharge

Released on J-STAGE: January 25, 2008 | Volume 2 Pages 044

Gyu Il SHIM, Takeshi YAMAUCHI, Hideo SUGAI

Validity of Electron Temperature Measurement by Using Boltzmann Plot Method in Radio Frequency Inductive Discharge in the Atmospheric Pressure Range

Released on J-STAGE: August 10, 2006 | Volume 1 Pages 028

Noriyasu OHNO, M. Abdur RAZZAK, Hiroshi UKAI, Shuichi TAKAMURA, Yoshihiko UESUGI

Local Gyrokinetic Vlasov Simulations with Realistic Tokamak MHD Equilibria

Released on J-STAGE: July 15, 2015 | Volume 9 Pages 1403029

Motoki NAKATA, Akinobu MATSUYAMA, Nobuyuki AIBA, Shinya MAEYAMA, Masanori NUNAMI, Tomo-Hiko WATANABE