Formation of a Tungsten Co-Deposition Layer with Microparticles Using Pulsed Laser Deposition

Abstract

This study performed tungsten (W) co-deposition experiments using pulsed laser deposition under exposure to helium/argon plasma in a linear plasma device. Micron-sized spherical W particles were formed under co-deposition conditions. It was suggested that these particles grew from nanoparticles via the electrostatic collection of W ions in the plasma plume before deposition.