A Computational Study of the Decomposition of Carbon Tetrafluoride in Wet Argon under Electron Beam Irradiation

Susumu KATO; Isao OKUDA; Eiichi TAKAHASHI; Yuji MATSUMOTO

doi:10.1585/pfr.3.038

Regular Articles

A Computational Study of the Decomposition of Carbon Tetrafluoride in Wet Argon under Electron Beam Irradiation

Susumu KATO, Isao OKUDA, Eiichi TAKAHASHI, Yuji MATSUMOTO

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Keywords: decomposition of per-fluorocompounds, electron beam irradiation, nonthermal plasma, kinetic model

JOURNAL FREE ACCESS

2008 Volume 3 Pages 038

DOI https://doi.org/10.1585/pfr.3.038

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Abstract

In this study, a computational method of the kinetic model of carbon tetrafluoride (CF₄) in wet argon gas under electron beam irradiation was developed. Using this method, the mechanism of decomposition and the optimum concentration of H₂O during decomposition of CF₄ was determined. It was found that 99% of 1000 ppm of CF₄ of in atmospheric-pressure argon gas decomposed at an input energy density of 1 J/cm³ .

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