Host: The Japanese Society for Artificial Intelligence
Name : The 33rd Annual Conference of the Japanese Society for Artificial Intelligence, 2019
Number : 33
Location : [in Japanese]
Date : June 04, 2019 - June 07, 2019
A real time display called a live image is used to search for a region to be observed, when observing a sample with a scanning electron microscope (SEM). This live image is usually an image with high noise and poor visibility. This makes it difficult to find an appropriate observation area. Therefore, in this research, a noise reduction model by deep neural network was created with the aim of improving the visibility of live images. We incorporated this model into the SEM and succeeded in obtaining a live image with less noise. This makes it possible to efficiently search for the observation region.
