A Comprehensive Yield Monitoring System for High-mix Low-volume Semiconductor Manufacturing

Abstract

Data-driven productivity improvement is a hot topic in semiconductor manufacturing. Intensive data analyses are conducted to realize yield enhancement utilizing big-data in semiconductor fabrications. We focus on the yield analysis for high-mix low-volume (HMLV) production which is demanded for diversity of products. In HMLV fabrications, the more kinds of products they produces, the more time the engineers have to spend on analyses, which leads to decreasing of productivity. In this paper, we proposed a comprehensive yield monitoring system for HMLV production. The system provides the improvement of automated classification and the efficient view across the different product groups.