Abstract
The solid-state reaction routes to humudity-sensitive Cu-P-Y-O based subatances, particularly to YPO4 from Cu3(PO4)2·3H2O and Y2O3 was investigated by XRD, TG-DTA, and SEM. In addition, the sintering temperature of the Cu-P-Y-O based ceramics was correlated with the humidity-sensitive characteristics, and the presence of Cu2O in the excellent Cu-P-Y-O based humidity sensor was also confirmed.