Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : C34
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Host: The Japan Society for Precision Engineering

Fabrication of 2-DOF microactuator of thin film metallic glass
*Heewon Jeong, Seiichi Hata, Akira Shimokohbe
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Keywords: microactuator, PZT thin film, cantilever with 90 degree bend, three-dimensional forming, metallic glass
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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