2002 JSPE Autumn Meeting
Session ID : C35
Conference information
Host: The Japan Society for Precision Engineering
Performance Evaluation of Nano-Manipulator using Non-Resonant type Ultrasonic Motor
*Fumito Imura, Kouji Kosaka, Tetsuya Kosaka, Yoshiya Egashira, Akira Nakada, Tetsuro Baba, Takeshi Kanou, Tetsuya Iwabuchi, Atsushi Arao, Hiroshi Kubota
Author information
Keywords:
nano-manipulation,
non-resonant type ultrasonic moter,
ultra precision positioning,
piezoelectric actuator
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