Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : D17
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Host: The Japan Society for Precision Engineering

Ultra Thin Processing Technology of Concave Type Quartz Substrate using Fine Particles Fluid Polising
*Masahiro Shimizu, Mutsumi Touge, Junji Watanabe
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Keywords: Fine Particles Fluid Polishing, Concave Type Quarts Substrate, Thining polishing, Flatness
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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