Abstract
It is well known that the accuracy of measurements of ultra-precision displacement sensor varies with the environmental conditions. Here we investigate the performances of displacement sensors with sub-micrometer resolution in different conditions and we also study the measuring errors of length measuring machines changing with the temperature and its adverse effect on the measurements. We use some displacement sensors.When the stage of positioning device with 10 nm resolution is moved by the step of 10 nm, 50 nm and 100 nm, the stage displacement will be measured by the displacement sensors. We can obtain the positioning resolution of by results of measuring. And we change the room temperature with the step of 5°C by air condition for getting known that the measure errors of the displacement sensors vary with environmental temperature.
