Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : F75
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Host: The Japan Society for Precision Engineering

Thermal Deformation Drift of nm Positioning Device
*Yoshiyuki Yamaguchi, Jiro Otsuka, Souji Ichikswa, Hirotoshi Maeda
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Keywords: ultra precision positioning device, nanometer resolution, thermal deformation
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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