2002 JSPE Autumn Meeting
Session ID : F80
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Host: The Japan Society for Precision Engineering
Development of an ultra-precision stage driven by the non-resonance type ultrasonic motor -(5th Report)-
*taishi Endo, Yoshiya Egashira, Hiroyuki Hashiguchi, Keiichi Nagamoto, Hiroyuki Furukawa, Kimifusa Koiso, Tetsuya Kosaka, Koji Kosaka, Akira Nakada, Hiroshi Kubota
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