2002 JSPE Autumn Meeting
Session ID : F81
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Host: The Japan Society for Precision Engineering
Development of an ultra-precision stage driven by the non-resonance type ultrasonic motor -(6th Report)-
*Yoshiya Egashira, Kouji Kosaka, Taishi Endou, Hiroyuki Hashiguchi, Keiichi Nagamoto, Tetsuya Iwabuchi, Tetsuya Kosaka, Tetsurou Baba, Akira Nakada, Hiroshi Kubota
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