Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : H21
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Host: The Japan Society for Precision Engineering

Fine Glass Pattern Fabrication by Nano Imprint Llithography
*Yoshihiko Hirai, Yoshio Tanaka, Tomohiro Kanakugi, Kazuyuki Yao, Takehiko Yamaguchi
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Keywords: nano fabrication, glass, lithography, imprint
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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