Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : J18
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Host: The Japan Society for Precision Engineering

Advanced Four Body Finishing -Abrasive Free Finishing Using Polymer Particles-
*Sanaki Horimoto, Kenji Kawata, Toshiyuki Enomoto, Yasuhiro Tani
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Keywords: abrasive free finishing, polymer particles, silicon wafer, amine
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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