Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : J32
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Host: The Japan Society for Precision Engineering

Development of Fixed Abrasive Tool for Cu-CMP
*Ui Yamaguchi, Souichi Katagiri, Masahiro Kaise, Fumiyuki Kanai, Minoru Honda
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Keywords: Chemical Mechanical Polishing, Fixed Abrasive Tool, planarization, copper, dishing, erosion
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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