Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : L79
Conference information

Host: The Japan Society for Precision Engineering

Analysis of effects of surface topography on CMP
*[in Japanese], [in Japanese], [in Japanese], [in Japanese]
Author information
Keywords: nanotopography, Polish, FEM, Wafer waviness
CONFERENCE PROCEEDINGS FREE ACCESS

Details
Download citation RIS

(compatible with EndNote, Reference Manager, ProCite, RefWorks)

BIB TEX

(compatible with BibDesk, LaTeX)

Text
How to download citation
Contact us
Abstract
[in Japanese]
Content from these authors
© 2002 The Japan Society for Precision Engineering
Previous article Next article
Favorites & Alerts

Recently viewed articles
Share this page
feedback
 Top