Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : L80
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Host: The Japan Society for Precision Engineering

Application of Polymer Particle Assisted Polishing with Oil Dispersion Slurries
*Wenjun Zhou, Yasuhiro Tani, Kenji Kawata
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Keywords: mirror polishing, oil dispersion slurry, carrier particle, tool plate, surface roughness
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Abstract
[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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