Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : N19
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Host: The Japan Society for Precision Engineering

Study on Three-dimensional Micro-machined Surface Measurement by means of Inverse Scattering Reconstruction Phase Method(7th Report) - Verification of the Instrumentation using Surface Topography Standard
*[in Japanese], [in Japanese], [in Japanese], [in Japanese]
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Keywords: micro-profile, optical measurement, phase retrieval, Fourier transform
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Abstract
[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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