Proceedings of JSPE Semestrial Meeting
2002 JSPE Autumn Meeting
Session ID : N20
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Host: The Japan Society for Precision Engineering

Basic study on development of the micro probe for micro parts measurement
*Ichiro Ogura, Yuichi Okazaki
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Keywords: profile measurement, coordinate measurement, probe
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[in Japanese]
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© 2002 The Japan Society for Precision Engineering
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