Proceedings of JSPE Semestrial Meeting
2003 JSPE Autumn Meeting
Session ID : I21
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Host: The Japan Society of Precision Engineering

Integrated micro probes made of thin film metallic glass - Thin film metallic glass micro probe and its properties
*Kouichi Wada, Hidenori Kitazume, Wataru Narazaki, Tadao Saito, Seiichi Hata, Junpei Sakurai, Akira Shimokohbe
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Keywords: probe, MEMS, thin film, metallic glass
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[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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