Proceedings of JSPE Semestrial Meeting
2003 JSPE Autumn Meeting
Session ID : I23
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Host: The Japan Society of Precision Engineering

Low-force contact of micromachined probe card to Cu electrodes
*[in Japanese], [in Japanese], [in Japanese]
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Keywords: probe card, MEMS, contact force, electric contact, microcantilever, fritting
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Abstract
[in Japanese]
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© 2003 The Japan Society for Precision Engineering
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