Abstract
This paper will focus on the MEMS (Microelectro mechanical Systems) clutch design, which operation torque is depends on electrical power control the curve arch clamp thermal deformation, not only to get the constant torque as an overload release clutch to prevent the damage but also can following the exterior driving force or fluid pressure input variance be allowed adjust the torque margin to achieve the miscellaneous requirements. In this study, a variable torque clutches design method is proposed and the validity by surface micromachining process.
